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Zhengzhou Protech Mechanical Equipment Co,. Ltd.

All Products >> tube furnace

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protech pecvd system for thin film coating
protech pecvd system for thin film coating
Specification: Dia. 80x 440x1000mmLength
Detail: Name Item Data 1) RF power Max. power 500W RF frequency 13.56MHz Reflection power 200W RF power output port 50Ώ Cooling 208~240VAC 2) Preheating furnace Max. temperature 1200C Working temperature 0~1150C Te...
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